Description :

Option items:
1. Chuck X-Y stage & chuck up/down.
2. Microscope upgrade for 135X or 200X max. magnification.
3. CCD/digital camera.
4. Micropositioner/manipulator.
5. Tip holder.
6. Probe tip.

Specification :

Specification:

1. Vacuum Chuck: (1) 4", (±10um flatness). (2) 3 Vacuum lines for different sample size. (3) Sample size: 5 x 5mm~4". (4) Platen for 6 Micropositioner.

2. Microscope: (1) Trinocular stereo-microscope. (2) Eye0.7~4.5. (3) Total magnification: 14~90X. (4) Fluorescent light.

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  Probe Stations
• 
  Probe Stations
• 
  Cryogenic Prober Station