Description :

1. LCD probe station for large substrate.
2. Resolution:
(1)4 platen for micropositioner (2left, 2right).
(2)1um resolution micropositioner.
(3)Vibration isolation.

Specification :

1. Specification: (1)Substrate size: large substrate (ex: 1300x900mm)

2. High magnification microscope: (1)EP.10~20X, Zoom.1~2X, OB.2X, 10X, 20X, 50X, etc. (2)Chuck theta. (3)Linear quick Z pneumatic up/down. (4)Microscope X-Y stage. (5)Encording positioning display with sub-micron.